Airgard’s scrubber is a great improvement over their competitors’ designs. It features patented gas inlets that eliminate process tool downtime due to inlet restrictions. The Airgard scrubber increases productivity and yields, eliminating costly process tool downtime. Typically, the Airgard scrubber pays for itself within a year. In fact, Airgard scrubbers are famous for their long maintenance intervals and reliability. Airgard averages less than 10 service calls per year on their entire installed base of over 1000 units. Coupled with exceptional efficiency, low water usage and a small footprint, Airgard’s scrubbers are an easy choice for companies like Wacker, MEMC, SUMCO, IBM, GlobiTech, Freescale Semiconductor, Texas Instruments, Analog Devices, Philips, ST Microelectronics, ASM America, Micron, ON Semiconductor, Maxim, International Rectifier, Infineon Technologies and Applied Materials.

Airgard’s engineering team, with more than 85 years of combined experience in epitaxial and silicon wafer processing, equipment development, facilities and maintenance, uses the guiding design philosophy of “elegance in simplicity.” Airgard uses their knowledge and experience along with chemical and thermal modeling to create solutions to their client’s varied challenges. Airgard’s engineers have earned 12 patents on their innovative designs.

Airgard’s epi scrubber is the culmination of 16 years of development and testing. Based on this foundation, Airgard has expanded their product line to include applications in Metal Etch, Poly Etch, Silicon Nitride and CVD. This product offering makes Airgard the supplier of choice at most device fabs, silicon manufacturers and epi service houses worldwide.