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  INFO@AIRGARD.NET   |   408.573.0701
INLETS
Heated CVD Inlet Heated / CVD
Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
Poly Etch CVD Inlet   Poly Etch / CVD
Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
High Temperature Inlet   High Temperature Inlet
For high temperature gas stream up to 220ÂșC.
Epitaxial Inlet   Epitaxial
Airgard specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.
PROCESSES / GASES
FAQs
FACILITY DRAWINGS
   
CERTIFICATIONS
CE EX-ATEX SEMI S2
       
"The AIRGARD scrubber is our system of choice for Epi abatement."
                  ~ Unattributed Author

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Airgard, Inc. Headquarters

Address
2190 Paragon Drive
San Jose, CA 95131

Phone
(408) 573.0701


Ebara Technologies EBARA is the Sales and Service Representative for Airgard Wet Scrubbers in the U.S.A., Asia and most of Europe. Encompass is offered directly from Airgard.
 

Ebara USA:
Ebara Technologies
51 Main Ave.
Sacramento, CA 95838
916.920.5451
ebaratech.com
email:

Ebara Europe:
EBARA Precision Machinery Europe
GmbH
Rodenbacher Chaussee 6
D-63457 Hanau, Germany
Phone: +49(6181)1876-0
Fax: +49(6181)1876-40
www.ebara-pm.eu
email:

Ebara Singapore:
Ebara Engineering Singapore Pte Ltd
No. 1 Tuas Link 2
Singapore 638550
Tel: (65) 68623536
Fax: (65) 68631201
ebara.com.sg
email:

Ebara Taiwan:
Ebara Precision Machinery Taiwan Inc.
5 Tzu-Chiang Rd.
Hsin-Chu Ind. Park
Taiwan, R.O.C 303
TEL: 886.3.597.8811
FAX: 886.3.597.8833
ebara-tep.com.tw
email:

Ebara Korea:
Ebara Precision Machinery Korea Inc.
20 Fl Kangnam Bldg.
1321 Seocho-dong, Seocho-ku
Seoul, Republic of Korea
Tel: 82.2.581.6901
Fax: 82.2.581.4211
ebara.co.kr
email:

Ebara China:
Shanghai Ebara Precision Machinery Co., Ltd.
Zhangjiang High-Tech Park
No. 76, Lane 887, Zuchongzhi Road,
Shanghai 201203
P.R.China
TEL: 86.21.5131.7008
FAX: 86.21.5131.7048
sepm-ebara.com/en/

email:

Ebara Japan:
Ebara Corporation
4-2-1 Honfujisawa
Fujisawa-shi Kanagawa 251-8502
Japan
Tel: 81.466.83.8111
Fax: 81.466.83.8885
ebara.co.jp
email:

MCU SRL MCU S.r.l. is the exclusive Sales and Service Representative for Airgard Exhaust Gas Scrubbers in France and Italy.
France & Italy:
Claudio Menconi
Via Casati 14
Monza 20052 (MB)
Italy
Tel: +39 039 322351
Fax: +39 039 322351
mcusrl.com
email: mcusrl@mcusrl.com
©2002-2017 AIRGARD   2190 Paragon Drive, San Jose, CA  95131   408.573.0701   INFO@AIRGARD.NET