The Cyclone is Airgard’s deluxe scrubber model and includes all the advanced features that allow Airgard to claim zero scrubber related process tool downtime.

Eductor Cone
Keeps exhaust line at slightly negative pressure (a nominal draw of 1”-2” of water.)

Packed Column
The final polish.
Packing requires no maintenance or replacement.

Fresh Water Input
Strategic position increases efficiency, minimizes water use and eliminates foam.

Sump Geometry
Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use.

Gas Inlet Devices
Patented gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions.

Second Scrubbing Chamber
Five fine spray, high velocity nozzles ensure effective removal of impurities.

First Scrubbing Chamber
Coarse spray, high flow nozzle coats chamber and removes bulk impurities.

Pump
Corrosion resistant, high output and long life. Recircluates 35GPM.

Small Footprint
24 ½” X 32 ½”

Epi
The Cyclone is Airgard's deluxe scrubber model and includes all the advanced features that allow Airgard to claim zero scrubber related process tool downtime. These features include the Airgard patented gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months. The Cyclone includes a PLC based scrubber control box (SCB) that can be mounted remotely. The SCB monitors scrubber water level, fresh water flow, recirculation pump flow and gas inlet plunger status. The gas inlet plunger is triggered by a variety of different conditions, including a fixed amount of time, high back pressure and/or a signal from the process tool. The SCB has a dry contact that allows the user to interface and interlock their process tool to the scrubber. The customer can connect that signal to an audible alarm, warning light or the reactor's scrubber status input. Additionally, the SCB saves on power and water by going into a "standby mode" when the reactor is not flowing corrosive gases. In the standby mode, the pump goes to low speed and the water is reduced from 2-3 gallons per minute to about 1 gallon per hour.

Poly Etch/CVD
The Cyclone model for the Poly Etch and CVD processes includes all the features of the Epi Cyclone. Due to the low flow rates of these processes, this model also includes the option of up to 4 gas inlet ports on each scrubber.

Heated Gas Inlet
The restriction formation mechanism for Metal Etch and some CVD chemistry is gases condensing on cold surfaces, therefore, Airgard has designed a gas inlet for preventing those restrictions. The Cyclone Heated Gas Inlet model includes a Teflon lined, heated gas inlet to minimize condensing species such as aluminum chloride in silicon nitride CVD applications. Inner surface temperatures of the Cyclone Heated Gas Inlet are temperature controlled to match the heated pump exhaust lines' inner surface temperatures. The Cyclone Heated Gas Inlet model includes all the features of the Epi Cyclone and also offers the option of up to 4 gas inlet ports on each scrubber.