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Cyclone XL [5,000SLM Capacity]
Airgard’s new High Capacity, High Efficiency Point- of-Use Wet Scrubber

Advantages • Lowest Cost of Ownership • Longest PM Interval • Fastest Maintenance • Highest Efficiency • Highest Uptime • Highest Reliability Applications • EPI(High Flow/Solar applications) • PV Processes • Silicon, CIGS • Solar Cell Processing • Purification Processes • Gas Cabinet Vent • Dedicated NH3 treatment for house separation Features • High Temp Teflon lined SS inlet • Fully Automated PLC controls • 5,000SLM Total Flow Capacity

Airgard wet scrubbers have a proven track record of high efficiency, unmatched reliability, and lowest cost of ownership for over 20 years in the semiconductor industry. Our fume scrubbers increase process tool uptime by reducing abatement related downtime to virtually zero. Airgard now offers an increased capacity model POU scrubber for the high flow requirements of the solar industry. The Cyclone XL combines all of the features and performance advantages of Airgard’s current wet scrubbers with an increased capacity of 5,000SLM. Airgard continues to lead the industry in high efficiency and low maintenance abatement.