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Heated CVD Inlet Heated / CVD
Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
Poly Etch CVD Inlet   Poly Etch / CVD
Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
High Temperature Inlet   High Temperature Inlet
For high temperature gas stream up to 220ºC.
Epitaxial Inlet   Epitaxial
Airgard specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.
"The AIRGARD scrubber is our system of choice for Epi abatement."
                  ~ Unattributed Author

Frequently Asked Questions

Q: What is Airgard’s standard warranty?
A: Airgard warrants its products for imperfections due to parts or labor for a period of one year from shipment date.

Q: How frequently should I activate my scrubber’s plunger?
A: Depending on the process from 4-48 hours. Airgard can review your process details and make a recommendation, which can then be included in the plunger software

Q: Why do I need a Safety Cage for my scrubber?
A: For processes running flammable gasses, the safety cage is there to ensure against injury or damage due an unforeseen mixture of air and flammable gas in the scrubber from improper purging, installation, or leaks.

Q: What is the value of more “draw” on my scrubber?
A: A slightly negative (relative to atmospheric pressure) pressure gives a margin of safety in the event of a leak in the scrubber or associated plumbing. It’s effect on process or pump performance is negligible.

Q: How can I protect my exhaust lines from ammonium nitrate deposits from my asher?
A: Install an Airgard scrubber just behind the vacuum pump. Regularly rinse the line between the pump and scrubber, and flush the vacuum pump as well.

Q: Does Airgard customize its scrubbers for specific applications?
A: Yes. Many options are available, such as heated inlet, pumped drain, chemical inject (for cleaning without stopping process), pH control, FM4910 material, Ethernet communication, and software customization.

Q: I would like a site visit – how should I arrange that?
A: Please contact us at

Q: I have extreme water usage constraints – what can an Airgard scrubber do to reduce water consumption?
A: We can limit the water usage according to the solubility of the gas being scrubbed, and/or the scrubber sump temperature.

Q: Has Airgard been certified for safety?  If so, by what agencies or designations?
A: Airgard Cyclone scrubbers are certified byTUV to the latest CE and S2 standards. A model that meets ATEX standards is also available.

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