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Heated CVD Inlet Heated / CVD
Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
Poly Etch CVD Inlet   Poly Etch / CVD
Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
High Temperature Inlet   High Temperature Inlet
For high temperature gas stream up to 220ºC.
Epitaxial Inlet   Epitaxial
Airgard specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.
"The AIRGARD scrubber is our system of choice for Epi abatement."
                  ~ Unattributed Author

Mark and Kris Johnsgard
AIRGARD, your partner in productivity

AIRGARD, Inc. was founded in 1988 by Mark and Kris Johnsgard. Prior to that time, the brothers worked as process engineers in the semiconductor industry where they became focused on the severe problems caused by unreliable fume scrubbers. Their intimate knowledge of the requirements necessary for scrubbers operating in semiconductor fabrication led directly to the invention of the AIRGARD Vortex scrubber.

Soon, the demand from chip and wafer manufacturers proved the value of their product. AIRGARD has gone on to become the “Vendor of Choice” for major semiconductor companies around the world, and enjoys the dominant market share for wet scrubbers worldwide.

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