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	Zero scrubber related process tool downtime. Scheduled maintenance intervals are 4-6 months and can be performed during process tool PMs. Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions. Automated gas inlet plunger removes restrictions without process interruption. Highly efficient removal of water soluble gases such as HCl, HF, HBr, NH3, F2, BCl3, Chlorosilanes (SiHCl3, SiH2Cl2, SiCl4) and Flourosilanes (SiF4). Reduces most harmful gas emissions to less than 1 part per million in high gas flow rates of up to 600 SLM. Lowest fresh water consumption in the industry - up to 50% less. Small footprint, 24 ½” X 32 ½”. No foaming and no sediment. Programmable logic scrubber control box automates gas inlet plunger to reactor functions and reports scrubber status.