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INLETS
Heated CVD Inlet Heated / CVD
Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
Poly Etch CVD Inlet   Poly Etch / CVD
Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
High Temperature Inlet   High Temperature Inlet
For high temperature gas stream up to 220ºC.
Epitaxial Inlet   Epitaxial
Airgard specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.
PROCESSES / GASES
FAQs
FACILITY DRAWINGS
   
CERTIFICATIONS
CE EX-ATEX SEMI S2
       
"The AIRGARD scrubber is our system of choice for Epi abatement."
                  ~ Unattributed Author

Inlet Configurations
Inlet 1 Std EPI only 1 port for EPI , vortex & Cyclone 2”PVC slip fit
Inlet 2 Std 1 to 4 port non-heated Vortex & Cyclone Poly 1 ½” slip fit PVC inlets are standard , can be modified to incorporate SS reinforced KF 40 flange adapters
Inlet 3 Std 1 to 4 port heated, Cyclone 1 ½” SS KF 40 flange
Inlet 4 Std XL 2 ports only, Unheated only , KF 80, SS

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