Superior Scrubber Performance - With more than 1400 scrubbers in the field servicing Epitaxial, Metal Etch, Poly Etch and CVD process abatement applications, it is no wonder that Airgard’s scrubbers are world renowned. Unrivaled in efficiency, the Airgard scrubber removes >99.99% of water-soluble gases by using a special combination of a specialized non-clogging gas inlet device, high flow spray chambers and a unique packed column design.
The Cyclone is Airgard’s deluxe scrubber model and includes all the advanced features that allow Airgard to claim zero scrubber related process tool downtime. MORE»
The Vortex is Airgard's original scrubber model and includes Airgard's patented gas entry device. When inlet restrictions occur, the gas inlet port is changed out manually in less than five minutes. MORE»
The Cyclone XL is Airgard's newest high capacity, high efficiency wet scrubber. It combines all of the features and performance advantages of Airgard’s current wet scrubbers with an increased capacity of 5,000SLM. MORE»
