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Heated CVD Inlet Heated / CVD
Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
Poly Etch CVD Inlet   Poly Etch / CVD
Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
High Temperature Inlet   High Temperature Inlet
For high temperature gas stream up to 220ºC.
Epitaxial Inlet   Epitaxial
Airgard specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.
"The AIRGARD scrubber is our system of choice for Epi abatement."
                  ~ Unattributed Author

Wet-Burn-Wet Case Study


  1. A Top Ten Semiconductor company evaluated a new option in Exhaust Management from Airgard on a Silicon Nitride CVD process. Airgard Encompass, the world’s first Wet-Burn-Wet abatement tool integrating wet scrubbers prior to a methane burner and followed by a wet scrubber was compared to a legacy Burn-Wet abatement tool. Encompass eliminates water soluble and water reactive gases prior to thermal decomposition virtually eliminating NOx emissions for processes using NH3 (ammonia) as well as significantly extending the maintenance cycle while preserving linear abatement performance for Green House Gas destruction.

  2. Procedures were consistent with the EPA Protocol for Measuring Destruction or Removal Efficiency of Fluorinated Greenhouse Gas Abatement Equipment in Electronics Manufacturing (EPA 430-R-10-003) March 2010. Incoming concentrations of NH3 were similar but output concentrations were not with N2O readings from Encompass Below Detectable Limits and overall NOx emissions reduced by over 90%. After testing the Encompass ran without maintenance for over 13 months and the customer calculated cost savings of 60% lower than the previous Tool Of Record (TOR).
  3. pdf document View SESHA Presentation


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