WHO WE ARE

Airgard is the supplier of choice for major semiconductor companies around the world, providing Point Of Use (POU) abatement (gas scrubber) solutions for deposition, etch and diffusion process tools.

WHAT WE DO

Airgard makes the most efficient and reliable Epi scrubbers available. We combine inlet device technology with a PLC-based control box and automated gas inlet plunger to produce a low-maintenance Epi scrubber. This performance results in higher uptime, greater process stability and increased safety. The Airgard scrubber combines 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry. 

Superior Technology

Gas inlet clogging in Epi scrubbers has been a major problem for decades. Years of experience in Epi reactor operation, design and maintenance led Airgard engineers to develop Point Of Use gas abatement technology that's unrivaled in the industry. The Airgard scrubber removes >99.99% of water-soluble gasses by using a special combination of patented non-clogging gas inlet device, high-flow spray chambers and a unique packed column design. Typical output emissions of HCI under the harshest Epi process conditions are well under 1 ppm. For Poly Etch and other CVD processes, one scrubber can handle up to four chambers.

Inlet Devices

Airgard's scrubbers and inlet devices are world renowned with more than 1000 units in the field servicing Epitaxial, Metal Etch, Poly Etch and CVD process abatement applications.