• Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
  • Poly Etch CVD Inlet: Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
  • High-Temperature Inlet: For high temperature gas stream up to 220ÂșC.
  • Epitaxial Inlet: Airgard-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.


Standard EPI. Only 1 port for EPI, vortex and Cyclone, 2 inch PVC slip fit.


Standard 1-to-4 port non-heated Vortex and Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters.



Standard XL 2 ports only, unheated only, KF 80, SS.


Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange.



For more information: 408.573.0701 or email sales@airgard.net



Airgard Products