- Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.
- Poly Etch CVD Inlet: Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.
- High-Temperature Inlet: For high temperature gas stream up to 220ºC.
- Epitaxial Inlet: Airgard-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.
Standard EPI. Only 1 port for EPI, vortex and Cyclone, 2 inch PVC slip fit.
Standard 1-to-4 port non-heated Vortex and Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters.
Standard XL 2 ports only, unheated only, KF 80, SS.
Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange.
For more information: 408.573.0701 or email sales@airgard.net
