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INLETS |
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Heated / CVD
Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero. |
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Poly Etch / CVD
Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions. |
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High Temperature Inlet
For high temperature gas stream up to 220ºC. |
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Epitaxial
Airgard specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months. |
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PROCESSES / GASES |
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FAQs |
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FACILITY DRAWINGS |
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CERTIFICATIONS |
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"The AIRGARD scrubber is our system of choice for Epi abatement."
~ Unattributed Author |
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